GB50073-2013······1
1总则······11
2术语······13
3空气洁净度等级······17
4总体设计······19
4.1洁净厂房委会选择和总平面布置······19
4.2工艺平面布置和设计综合协调······19
4.3人员净化和物料净化······20
4.4噪声控制······22
4.5维振控制······23
5建筑······25
5.1一般规定······25
5.2防火和疏散······25
5.3室内装修······27
6空气净化······29
6.1一般规定······29
6.2洁净室压差控制······30
6.3气流流型和送风量······30
6.4空气净化处理······31
6.5采暖通风、防排烟······32
6.6风管和附件······33
7给水排水······35
7.1一般规定······35
7.2给水······35
7.3排水······36
7.4消防给水和灭火设备······36
8工业管道······38
8.1一般规定······38
8.2管道材料和阀门······39
8.3管道连接······39
8.4安全技术······40
9电气······42
9.1配电······42
9.2照明······42
9.3通信······43
9.4自动控制······44
9.5静电防护及接地······44
附录A洁净室或洁净区性能测试和认证······46
附录B洁净厂房生产工作间的火灾危险性分类举例······52
附录C净化空调系统设计对维护管理的要求······53
本规范用词说明······54
引用标准名录······55
附：条文说明······57
1总则······60
3空气洁净度等级······61
4总体设计······62
4.1洁净厂房委会选择和总平面布置······62
4.2工艺平面布置和设计综合协调······65
4.3人员净化和物料净化······66
4.4噪声控制······70
4.5维振控制······74
5建筑······76
5.1一般规定······76
5.2防火和疏散······76
5.3室内装修······80
6空气净化······82
6.1一般规定······82
6.2洁净室压差控制······83
6.3气流流型和送风量······86
6.4空气净化处理······88
6.5采暖通风、防排烟······90
6.6风管和附件······91
7给水排水······93
7.1一般规定······93
7.2给水······94
7.3排水······95
7.4消防给水和灭火设备······96
8工业管道······99
8.1一般规定······99
8.2管道材料和阀门······102
8.3管道连接······103
8.4安全技术······105
9电气······107
9.1配电······107
9.2照明······109
9.3通信······112
9.4自动控制······113
9.5静电防护及接地······114
附录A洁净室或洁净区性能测试和认证······116
